@inproceedings{a3aa836d3e50497c93ceedb66d1f0a0f,
title = "A SAW Pressure Sensor based on AlN thin film with a Novel Differential Structure: Balancing Sensitivity Enhancement and Temperature Decoupling",
abstract = "Two SAW devices were integrated on a pressure-sensitive diaphragm based on an AlN film substrate. The placement of the devices was carefully designed according to the frequency variation behavior of the SAW devices and the strain distribution across the diaphragm, forming an effective differential structure. Experimental results demonstrated the beneficial effects of this design: the pressure sensitivity increased from 2.2267 ppm/kPa to 24.8767 ppm/kPa, while the temperature sensitivity decreased from 21.2572 ppm/°C to 3.8763 ppm/°C.",
keywords = "AlN thin film, SAW pressure sensor, Temperature decoupling",
author = "Aobei Chen and Dapeng Li and Ge Gao and Chun Hu and Dezhi Zheng",
note = "Publisher Copyright: {\textcopyright} 2025 IEEE.; 9th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2025 ; Conference date: 09-03-2025 Through 12-03-2025",
year = "2025",
doi = "10.1109/EDTM61175.2025.11040413",
language = "English",
series = "9th IEEE Electron Devices Technology and Manufacturing Conference: Shaping the Future with Innovations in Devices and Manufacturing, EDTM 2025",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "9th IEEE Electron Devices Technology and Manufacturing Conference",
address = "United States",
}