Multi-Degree of Freedom and Large Scan Range Electrothermal Micromirror Integrated with Thermal Convection-Based Mirror Plate Position Sensors

Anrun Ren; Yingtao Ding; Hengzhang Yang; Ziyue Zhang; Hui Zhao; Huikai Xie

doi:10.1109/MEMS61431.2025.10917554

Multi-Degree of Freedom and Large Scan Range Electrothermal Micromirror Integrated with Thermal Convection-Based Mirror Plate Position Sensors

Anrun Ren, Yingtao Ding^*, Hengzhang Yang, Ziyue Zhang, Hui Zhao, Huikai Xie^*

^*此作品的通讯作者

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

摘要

In this work, we demonstrate a novel electrothermal micromirror integrated with thermal convection-based mirror-plate position sensors. The micromirror can generate multiple degree-of-freedom (DOF) motions including piston displacement and dual-axis angular scanning. The piston displacement can reach 400 μm, and the optical scan angles along x-axis and y-axis are up to 35° and 29°, respectively, at only 6 Vdc. Quasi-static measurements show that the sensitivities of the position sensors in piston displacement and angular scans along x-axis and y-axis are 0.7 mV/μm, 5.1 mV/°, and 4.7 mV/°, respectively.

源语言	英语
主期刊名	2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025
出版商	Institute of Electrical and Electronics Engineers Inc.
页	1059-1062
页数	4
ISBN（电子版）	9798331508890
DOI	http://doi.org/10.1109/MEMS61431.2025.10917554
出版状态	已出版 - 2025
已对外发布	是
活动	38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025 - Kaohsiung, 中国台湾期限: 19 1月 2025 → 23 1月 2025

出版系列

姓名	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN（印刷版）	1084-6999

会议

会议	38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025
国家/地区	中国台湾
市	Kaohsiung
时期	19/01/25 → 23/01/25

访问文件

10.1109/MEMS61431.2025.10917554

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链接到 Scopus 的出版物

引用此

Ren, A., Ding, Y., Yang, H., Zhang, Z., Zhao, H., & Xie, H. (2025). Multi-Degree of Freedom and Large Scan Range Electrothermal Micromirror Integrated with Thermal Convection-Based Mirror Plate Position Sensors. 在 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025 (页码 1059-1062). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. http://doi.org/10.1109/MEMS61431.2025.10917554

Ren, Anrun ; Ding, Yingtao ; Yang, Hengzhang 等. / Multi-Degree of Freedom and Large Scan Range Electrothermal Micromirror Integrated with Thermal Convection-Based Mirror Plate Position Sensors. 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025. Institute of Electrical and Electronics Engineers Inc., 2025. 页码 1059-1062 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{5cb1327a5956468e8470ebd650de7c5c,

title = "Multi-Degree of Freedom and Large Scan Range Electrothermal Micromirror Integrated with Thermal Convection-Based Mirror Plate Position Sensors",

abstract = "In this work, we demonstrate a novel electrothermal micromirror integrated with thermal convection-based mirror-plate position sensors. The micromirror can generate multiple degree-of-freedom (DOF) motions including piston displacement and dual-axis angular scanning. The piston displacement can reach 400 μm, and the optical scan angles along x-axis and y-axis are up to 35° and 29°, respectively, at only 6 Vdc. Quasi-static measurements show that the sensitivities of the position sensors in piston displacement and angular scans along x-axis and y-axis are 0.7 mV/μm, 5.1 mV/°, and 4.7 mV/°, respectively.",

keywords = "electrothermal actuation, Electrothermal micromirror, position sensor, thermal convection",

author = "Anrun Ren and Yingtao Ding and Hengzhang Yang and Ziyue Zhang and Hui Zhao and Huikai Xie",

note = "Publisher Copyright: {\textcopyright} 2025 IEEE.; 38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025 ; Conference date: 19-01-2025 Through 23-01-2025",

year = "2025",

doi = "10.1109/MEMS61431.2025.10917554",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "1059--1062",

booktitle = "2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025",

address = "United States",

}

Ren, A, Ding, Y, Yang, H, Zhang, Z, Zhao, H & Xie, H 2025, Multi-Degree of Freedom and Large Scan Range Electrothermal Micromirror Integrated with Thermal Convection-Based Mirror Plate Position Sensors. 在 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., 页码 1059-1062, 38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025, Kaohsiung, 中国台湾, 19/01/25. http://doi.org/10.1109/MEMS61431.2025.10917554

Multi-Degree of Freedom and Large Scan Range Electrothermal Micromirror Integrated with Thermal Convection-Based Mirror Plate Position Sensors. / Ren, Anrun; Ding, Yingtao; Yang, Hengzhang 等.
2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025. Institute of Electrical and Electronics Engineers Inc., 2025. 页码 1059-1062 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

TY - GEN

T1 - Multi-Degree of Freedom and Large Scan Range Electrothermal Micromirror Integrated with Thermal Convection-Based Mirror Plate Position Sensors

AU - Ren, Anrun

AU - Ding, Yingtao

AU - Yang, Hengzhang

AU - Zhang, Ziyue

AU - Zhao, Hui

AU - Xie, Huikai

PY - 2025

Y1 - 2025

N2 - In this work, we demonstrate a novel electrothermal micromirror integrated with thermal convection-based mirror-plate position sensors. The micromirror can generate multiple degree-of-freedom (DOF) motions including piston displacement and dual-axis angular scanning. The piston displacement can reach 400 μm, and the optical scan angles along x-axis and y-axis are up to 35° and 29°, respectively, at only 6 Vdc. Quasi-static measurements show that the sensitivities of the position sensors in piston displacement and angular scans along x-axis and y-axis are 0.7 mV/μm, 5.1 mV/°, and 4.7 mV/°, respectively.

AB - In this work, we demonstrate a novel electrothermal micromirror integrated with thermal convection-based mirror-plate position sensors. The micromirror can generate multiple degree-of-freedom (DOF) motions including piston displacement and dual-axis angular scanning. The piston displacement can reach 400 μm, and the optical scan angles along x-axis and y-axis are up to 35° and 29°, respectively, at only 6 Vdc. Quasi-static measurements show that the sensitivities of the position sensors in piston displacement and angular scans along x-axis and y-axis are 0.7 mV/μm, 5.1 mV/°, and 4.7 mV/°, respectively.

KW - electrothermal actuation

KW - Electrothermal micromirror

KW - position sensor

KW - thermal convection

UR - http://www.scopus.com/pages/publications/105001666100

U2 - 10.1109/MEMS61431.2025.10917554

DO - 10.1109/MEMS61431.2025.10917554

M3 - Conference contribution

AN - SCOPUS:105001666100

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 1059

EP - 1062

BT - 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025

Y2 - 19 January 2025 through 23 January 2025

ER -

Ren A, Ding Y, Yang H, Zhang Z, Zhao H, Xie H. Multi-Degree of Freedom and Large Scan Range Electrothermal Micromirror Integrated with Thermal Convection-Based Mirror Plate Position Sensors. 在 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025. Institute of Electrical and Electronics Engineers Inc. 2025. 页码 1059-1062. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMS61431.2025.10917554

Multi-Degree of Freedom and Large Scan Range Electrothermal Micromirror Integrated with Thermal Convection-Based Mirror Plate Position Sensors

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