Fabrication of high-performance suspended bilayer graphene-based NEMS pressure sensor with arrays of cavities

Pressure sensors are devices that commonly convert pressure changes into electrical signals and are widely applied in industrial automation, aerospace, weather monitoring and other fields. In recent years, graphene-based pressure sensors have received extensive attention from researchers due to ultra-high sensitivity. However, previous studies on graphene-based pressure sensors have typically been limited to monolayer graphene membrane, and most of them were based on single cavity. Hence, this paper proposes a suspended bilayer graphene-based NEMS pressure sensor with graphene suspended over arrays of cavities. The pressure sensor consists of a 10×10 arrays of cavities over which graphene membrane was suspended, resulting in a sensitivity of 3.75×10^-5 kPa^-1 in the pressure measurement range of 040 kPa. The experimental results would provide the guidance for the subsequent design of the graphene-based NEMS pressure sensors.