@inproceedings{cd0b5ecb568d41219358b6d78cf209af,
title = "Enhanced reliability and precision for internal laser processing of semiconductors using temporal domain strategies",
abstract = "Ultrashort laser processing allows writing three-dimensional patterns in the bulk of most transparent materials. However, for semiconductors like silicon or gallium arsenide this is extremely challenging due to the high refractive index and the detrimental nonlinear propagation and plasma effects in most cases. Nonetheless, by temporally tailoring the laser pulses, we demonstrate solutions for high-performance in-volume laser processing. Notably, by using nanosecond and picosecond pulses or THz-repetition rate bursts of ultrashort pulses we can write micro-sized structures in different semiconductors. With this, we demonstrate laser welding of dissimilar semiconductors, high-aspect ratio optical channels, and stealth dicing of wafers. These demonstrations must open the door for new solutions for monolithic optical devices and quantum technologies in the semiconductor industry.",
keywords = "femtosecond, infrared, Laser processing, semiconductor, silicon",
author = "Pol Sope{\~n}a and Andong Wang and Niladri Ganguly and Alexandros Mouskeftaras and David Grojo",
note = "Publisher Copyright: {\textcopyright} 2025 SPIE.; Nanoscale and Quantum Materials: From Synthesis and Laser Processing to Applications 2025 ; Conference date: 25-01-2025 Through 27-01-2025",
year = "2025",
doi = "10.1117/12.3049658",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Kabashin, \{Andrei V.\} and Maria Farsari and Masoud Mahjouri-Samani",
booktitle = "Nanoscale and Quantum Materials",
address = "United States",
}