@inproceedings{05e2ddccf90a48a5bdd39649703722fc,
title = "Additive and subtractive 3D-microfabrication of micro/nanostructures",
author = "Lu, \{Y. F.\} and W. Xiong and Jiang, \{L. J.\} and Zhou, \{Y. S.\} and Y. Gao and T. Baldacchini and Silvain, \{J. F.\} and L. Jiang",
year = "2015",
language = "English",
series = "Proceedings 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015",
publisher = "Optical Society of America",
booktitle = "Proceedings 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015",
note = "2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015 ; Conference date: 21-06-2015 Through 25-06-2015",
}